2SMPP-03 MEMS Gauge Pressure Sensor MEMS Gauge Pressure Sensor Featuring Small Size and Low Power Consumption • Superior electrical characteristics at -50 kPa to 50 kPa pressure range. Offset voltage of -2.5±4.0 mV Span voltage of 42.0±5.5 mV (At rated pressure 50 kPa, 100 µADC Current supply) • Small package 6.1 × 4.7 × 8.2 mm (L × W × H). • Good temperature dependency at 0 to 85°C, at rated pressure 0 to 50 kPa Temp. influence of span of ±3.0%FS Temp. influence of offset of ±5.0%FS (100 µADC Current supply) • Rated power consumption of 0.2 mW RoHS Compliant Refer to the Safety Precautions on page 7. Ordering Information Standard Models with Surface mount package Model Classification Structure Packaging MOQ (Minimum Order Quantity) 2SMPP-03 Bottom Port Type SOP Plastic sleeve 112 pcs/ 1 sleeve Terminal Arrangement Connection Diagram ➅ Icc ➀ Vout (+) 5 6 ➁ Non Connected ➄ N-sub + ➃ Vout (−) ➂ GND R2 R1 Output voltage Constant current 1 4 − source R3 R4 3 Note: If necessary, add a variable resistor below the GND pin (3). The NC pin (2) must be secured to the circuit board. 1 2SMPP-03 2SMPP-03 MEMS Gauge Pressure Sensor Application Examples • Home appliance • Air movement control • Level indicators • Leak detection • Pressure controller Specifications ■ Ratings Item 2SMPP-03 Type of pressure Gauge pressure Sensing method Piezoresistance Pressure medium Air Driving method Constant current drive Drive current 100 µADC Pressure range -50 to 50 kPa Withstand pressure -80 to 120 kPa Absolute maximum current 200 µADC max. Ambient operating temperature -10 to 100°C (with no icing and condensation) Ambient operating humidity 10 to 95%RH (with no icing and condensation) Ambient storage temperature -40 to 120°C (with no icing and condensation) Ambient storage humidity 10 to 95%RH (with no icing and condensation) Weight 0.17 g Note: 1. The above values are initial values measured at ambient temperature condition of 23°C. Note: 2. Please avoid caustic gases. 2 2SMPP-03 2SMPP-03 MEMS Gauge Pressure Sensor Characteristics ■ Operating characteristics Positive pressure (at rated pressure 0 to 50 kPa) Item Min. Typ. Max. Unit Supply current - 100 - µADC Bridge resistance 18.0 20.0 22.0 kohm Operating pressure range 0 - 50 kPa Offset voltage -6.5 -2.5 1.5 mV Span voltage 36.5 42.0 47.5 mV Non-linearity 0.3 0.8 1.3 %FS Pressure hysteresis -0.2 0.0 0.2 %FS Temperature influence of span voltage at 0°C -1.0 1.0 3.0 %FS Temperature influence of span voltage at 50°C -2.1 -0.1 1.9 %FS Temperature influence of span voltage at 85°C -2.0 1.0 4.0 %FS Temperature influence of offset voltage at 0°C -4.0 -1.0 2.0 %FS Temperature influence of offset voltage at 50°C -2.0 1.0 4.0 %FS Temperature influence of offset voltage at 85°C -3.0 2.0 7.0 %FS Negative pressure (at rated pressure 0 to -50 kPa) Item Min. Typ. Max. Unit Supply current - 100 - µADC Bridge resistance 18.0 20.0 22.0 kohm Operating pressure range -50 - 0 kPa Offset voltage -6.5 -2.5 1.5 mV Span voltage -48.5 -43.0 -37.5 mV Non-linearity -0.3 0.2 0.7 %FS Pressure hysteresis -0.2 0.0 0.2 %FS Temperature influence of span voltage at 0°C -1.2 0.8 2.8 %FS Temperature influence of span voltage at 50°C -1.9 0.1 2.1 %FS Temperature influence of span voltage at 85°C -1.8 1.2 4.2 %FS Temperature influence of offset voltage at 0°C -4.0 -1.0 2.0 %FS Temperature influence of offset voltage at 50°C -2.0 1.0 4.0 %FS Temperature influence of offset voltage at 85°C -3.0 2.0 7.0 %FS Note: 1. The above values are initial values. Note: 2. Ambient temperature condition: 23°C without Temperature property. Note: 3. The above values are operated at 100 µADC Note: 4. The above values are operated at 0 to 50 kPa, and 0 to -50 kPa. Note: 5. Offset voltage is defined as the output voltage at 0 kPa rated pressure. Note: 6. Positive span voltage is defined as the algebraic difference between the output voltage at 50 kPa rated pressure and the output voltage at 0 kPa rated pressure. Note: 7. Negative span voltage is defined as the algebraic difference between the output voltage at -50 kPa rated pressure and the output voltage at 0 kPa rated pres- sure. Note: 8. Hysteresis is defined as follows, In case of positive pressure: {The output voltage difference at 0 kPa before and after a pressure cycle (0 to 50 to 0 kPa)} / (span voltage) × 100 [%FS]. In case of negative pressure: {The output voltage difference at 0 kPa before and after a pressure cycle (0 to -50 to 0 kPa)} / (span voltage) × 100 [%FS]. Note: 9. Temperature influence of span voltage is defined as follows, {Span voltage at 0°C. - span voltage at 25°C. } / span voltage at 25°C. × 100 [%FS] {Span voltage at 50°C. - span voltage at 25°C. } / span voltage at 25°C. × 100 [%FS] {Span voltage at 85°C. - span voltage at 25°C. } / span voltage at 25°C. × 100 [%FS] Note: 10.Temperature influence of offset voltage is defined as follows, {Offset voltage at 0°C. - offset voltage at 25°C. } / span voltage at 25°C. × 100 [%FS] {Offset voltage at 50°C. - offset voltage at 25°C. } / span voltage at 25°C. × 100 [%FS] {Offset voltage at 85°C. - offset voltage at 25°C. } / span voltage at 25°C. × 100 [%FS] Environment characteristics Item 2SMPP-03 Destruction 10 to 500 Hz 10 G Vibration Resistance Malfunction 10 to 500 Hz 10 G Destruction 15 G Shock Resistance Malfunction 15 G Life Expectancy 100,000 Operations min. (0 to 75 kPa) ESD 1,000 V (Human body model) Package Material PPS (Polyphenylenesulfide) 3 2SMPP-03 2SMPP-03 MEMS Gauge Pressure Sensor Example of Application Circuit for MEMS Pressure Sensor VDD Constant current circuit unit Amplifier circuit unit Pressure + + − Sensor − − + Vout − + (1) The pressure sensor is designed to convert a voltage by means of constant current drive. (2) Please amplifier the output voltage of the pressure sensor by using the amplifying circuit if necessary. Engineering Data (for Reference) ■ Output Characteristics Rated Pressure vs. Output Voltage 40 30 20 10 0 –10 –20 –30 –40 –50 –50 –40 –30 –20 –10 0 10 20 30 40 50 Rated Pressure (kPa) Note: 1. Ambient temperature condition: 23°C. Note: 2. Drive current: 100 µA Note: 3. These output voltage characteristics are measured with tester without a mounting board. Note: 4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual equipment before use. 4 2SMPP-03 Output voltage (mV) 2SMPP-03 MEMS Gauge Pressure Sensor Temperature influence of Span voltage (at 0 to 50 kPa) Temperature influence of Offset voltage (at 0 kPa) 2 3 2.5 1.5 2 1.5 1 1 0.5 0.5 0 0 –0.5 –1 –0.5 –1.5 –2 –1 –10 0 10 20 30 40 50 60 70 80 90 –10 0 10 20 30 40 50 60 70 80 90 Temperature (˚C) Temperature (˚C) Note: 1. Measured points are 0°C, 25°C, 50°C and 85°C at 0 to 50 kPa. Note: 2. Drive current: 100 µA Note: 3. These output voltage characteristics are measured with tester without a mounting board. Note: 4. The output voltage characteristics may be influenced by the mounting board. Be sure to check operation including durability in actual equipment before use. Pressure Cycle Range ( 0 to 75 kPa) 1 1 0.5 0.5 0 0 –0.5 –0.5 –1 –1 0 25,000 50,000 75,000 100,000 0 25,000 50,000 75,000 100,000 Pressure cycle Pressure cycle Note: 1. Tested temperature condition: 25°C 5 Note: 2. Number of pressure cycle time: 1 × 10 Note: 3. Rated cycle pressure: 0 to 75 kPa Note: 4. These output voltage characteristics are measured with tester without a mounting board. 5 Offset voltage range (%FS) Temp. Influence of Positive Span Voltage (%FS) Span voltage range (%FS) Temp. Influence of Offset Voltage (%FS) 2SMPP-03 2SMPP-03 MEMS Gauge Pressure Sensor Dimensions Note: All units are in millimeters unless otherwise indicated. 4.75 4.10 0.25±0.05 3#1 3.80 dia. 0.62 dia. 6.15 9.85 3.20 5.50 4-R0.50 46 1.27 0.40 1.27 x 2 = 2.54 1.00 2.00 1.50 2.80 1.00 (1.10) 4.75 0.80 1.80 dia. 2.60 dia. Pin Diagram (Top Surface of Sensor) Atmospheric pressure hole 1 Vout (+) 6 Icc 2 NC 5 N-sub 3 GND 6 Vout (-) Markings Recommended Pad Dimensions 5.45 0.75 11.05 0.10 8.75 4.00 dia. 0.90 1.27 1.125 PP 0 3 4.05 1.125 0.45 5 6 7 8 0.60 2.30 (0.90) 1.65 1.65 Lot No. (1.075) 3.30 Note: Unless otherwise specified, the tolerance for all of the above drawings is ±0.3 mm. 6 2SMPP-03 A 2SMPP-03 MEMS Gauge Pressure Sensor Safety Precautions Precautions for Correct Use Handling the Sensor (4) Keep in an appropriate temperature and humidity condition (1) Only air can be used as pressure media on the products specified as directly. It is prohibited to use pressure media including cor- Temperature : 5 to 30°C , Humidity : 40 to 60%. rosive gases (e.g. organic solvents gases, sulfur dioxide and (5) As the lead is plated with silver, there is a possibility of being hydrogen sulfide gases), fluid and any other foreign materi- tarnished depending on storage condition. als. Not guarantee the tarnishing after shipping. Be careful the (2) The products are not water proof. Please keep dry in use. method of storage. (3) Don't use the products under dew-condensing conditions. (6) Don't keep the products under humid or dusty condition. Frozen fluid on sensor chips may also cause fluctuation of sensor output and any other troubles. Mounting Method (4) Don't put foreign materials (e.g. a wire and a pin) into a con- • Use lands on the printed-circuit boards to which the sensor can be securely fixed. necting tube. It may cause breakage of pressure sensor • Fix pin No.2 on the printed-circuit boards, not fixed causes chips or fluctuation of sensor output caused by clogging the fluctuation of sensor output signals. tube. (5) Use the products within rated pressure. Usage at pressure Soldering Method out of the range may cause breakage. • Due to its small size, the thermal capacity of the pressure sen- (6) Don't use under high-frequency vibration including ultra- sor is low. Therefore, take steps to minimize the effects of sonic wave. external heat. (7) The products may be broken by static electricity. Charged • Dip soldering bath: Max. 260°C, within 10 sec. materials (e.g. a workbench and a floor) and workers must • Soldering iron: Max. 260°C, within 10 sec. provide measures against static electricity, including ground • Do not heat the case of sensor package, heat only terminal. connection. • Use a non-corrosive resin type of flux. Since the pressure sen- (8) Overpowering terminals may deform them and detract their sor chip is exposed to the atmosphere, do not allow flux to solder abilities. Don't drop and handle the products roughly. enter inside. (9) Don't use the products under humid or dusty condition. (10) Terminals connection of pressure sensors must be handled Cleaning as directed by a connection diagram. • Since the pressure sensor chip is exposed to atmosphere, do not allow cleaning fluid to enter inside. Environmental Condition for Transportation and Storage • Avoid ultrasonic cleaning since this may cause breaks or dis- (1) It is prohibited to keep the products with corrosive gases connections in the wiring. (e.g. organic solvents gases, sulfur dioxide and hydrogen • Do not wash the print circuit board after the pressure sensor is sulfide gases). mounted using detergent containing silicone. Otherwise, the (2) The products are not water proof. Please keep dry during detergent may remain on the surface of the pressure sensor. storage. (3) An anti-static treatment has been applied to the sleeves. Coating Please note the following points. • Do not coat the pressure sensor when it is mounted to the print 1. Getting wet may remove an anti-static treatment and circuit board. eliminate its effect. 2. The sleeve may feel sticky under hot and humid condition due to the nature of the anti-static treatment. 3. Anti-static has aging degradation. It is prohibited to keep the sleeves for more than six months. The sleeves are also non-reusable. 7 2SMPP-03 MEMO 8 Terms and Conditions Agreement Read and understand this catalog. Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you have any questions or comments. Warranties. (a) Exclusive Warranty. Omron’s exclusive warranty is that the Products will be free from defects in materials and workmanship for a period of twelve months from the date of sale by Omron (or such other period expressed in writing by Omron). Omron disclaims all other warranties, express or implied. (b) Limitations. 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