D6F-A1 MEMS Flow Sensor A Compact, High-accuracy Sensor That Measures Low Flow Rates. • High accuracy of ±3% FS. Flow rates can be measured without being affected by temperature or pressure. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-01A1-110 D6F-02A1-110 6.0 6.0 Applicable fluid Flow rate range Model 5.0 5.0 0 to 1 L/min D6F-01A1-110 Air 4.0 4.0 0 to 2 L/min D6F-02A1-110 3.0 3.0 2.0 2.0 Accessory (included) 1.0 1.0 0.0 0.0 Type Model 0.0 0.4 0.8 1.2 1.6 2.0 0.0 0.2 0.4 0.6 0.8 1.0 Flow rate (L/min) Flow rate (L/min) Cable D6F-CABLE1 D6F-01A1-110 Flow rate 0 0.2 0.4 0.6 0.8 1.0 Connections L/min (normal) Output voltage 1.00 2.31 3.21 3.93 4.51 5.00 D6F-01A1-110 V ±0.12 ±0.12 ±0.12 ±0.12 ±0.12 ±0.12 D6F-02A1-110 Pin No. 1: Vcc D6F-02A1-110 2: Vout Flow rate 3: GND 0 0.4 0.8 1.2 1.6 2.0 L/min (normal) Connector 53398 (Made by Molex Japan) Output voltage 1.00 2.59 3.53 4.18 4.65 5.00 Use the following connectors for connections to the D6F: V ±0.12 ±0.12 ±0.12 ±0.12 ±0.12 ±0.12 Housing 51021 (Made by Molex Japan) Terminals 50079 (Made by Molex Japan) Measurement conditions: Power supply voltage of 12±0.1 VDC, ambient tem- Wires AWG28 to AWG26 perature of 25±5°C, and ambient humidity of 35% to 75%. Tubes Install tubes made of materials such as rubber or urethane so that they will not come out. For urethane tubes, tubes with an outer diameter of 12 mm and an inner diameter of 8 mm are recommended. 2: Vout 1: Vcc 3: GND Enlarged View 8 Output voltage (V) Output voltage (V) D6F-A1 MEMS Flow Sensor Characteristics/Performance Model D6F-01A1-110 D6F-02A1-110 Flow Range (See note 1.) 0 to 1 L/min 0 to 2 L/min. Calibration Gas (See note 2.) Air Bamboo joint Flow Port Type Maximum outside diameter: 8.6 mm, Minimum outside diameter: 7.4 mm Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ) Accuracy ±3% FS (25°C characteristic) Repeatability (See note 3.) ±0.3% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ) Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure 200 kPa Pressure Drop (See note 3.) 0.42 kPa 1.06 kPa Operating Temperature (See note 4.) −10 to 60°C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) −40 to 80°C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics ±3% FS for 25°C characteristic at an ambient temperature of −10 to 60°C Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 12.8 g Note: 1. Volumetric flow rate at 0°C, 101.3 kPa. Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Note: 3. Reference (typical) Note: 4. With no condensation or icing. Dimensions (Unit: mm) D6F-01A1-110 8.6 dia. D6F-02A1-110 7.4 dia. 3.5-dia. through hole 15.1 Mounting Hole Dimensions 4 R4 Two, M3 screws 8 ±0.1 30 30±0.05 66 41 (3.7) R1.75 4.5 9.5 (7.45) ±0.05 28 R4.25 3.5 Through hole 4 (6) 20 Cable (included): D6F-CABLE1 28±0.1 200±35 20 Brown wire ±15 100 1. Vcc Black wire 0.5 2. Vout 6.5 4.5 Blue wire 3. GND 9