ADVANCED ENERGY EG353

HITEK POWER® EG353 SERIES HIGH-STABILITY 35 KV HIGH VOLTAGE POWER SUPPLIES FOR PRECISION SEM E-BEAM APPLICATIONS High-stability 35 kV high voltage power supplies for precision SEM e-beam applications The high stability and reliability of EG353 high voltage power supplies elevate the performance and quality of your entire system. This series meets the demanding requirements of SEM (scanning electron microscope) applications, including inspection, material and biological sciences, and forensics. Based on proven design techniques and power-conversion technologies, EG353 power supplies deliver a dependable performance that helps maximize image quality and repeatability. FEATURES › Low ripple (< 1.6 ppm, accelerator) and high stability (< 10 ppm, accelerator) › Small-volume or 19" rack-mounted versions › -35 kV accelerator, 200 μA, 50 mV ripple › +10 kV extractor, 400 μA, 20 mV ripple (floating) › -1 kV suppressor, 100 μA, 30 mV ripple (floating) › 5 V at 3 A current-controlled low-ripple (LF < 1 mA, peak to peak) heater (floating) › Optional grounded outputs using expansion interface › Full digital control and monitoring (fiber-isolated RS-232) › RoHS compliant to EU Directive 2011/65/EU › CE marked for EU LV Directive 2006/95/EC ASK US ABOUT DERIVATIVES AND SPECIAL PRODUCTS BUILT TO YOUR REQUIREMENTS. SPECIFICATIONS ELECTRICAL INPUT 23 to 25 VDC, 24 VDC nominal Voltage 2.3 ADC max at 23 VDC input Current 5 A time delay internal PCB-mounted fuse Protection Electrical Output Accelerator Suppressor Extractor Filament < 0.3 V for a 1 VDC input < 0.1 V for a 1 VDC input < 0.5 V for a 1 VDC input 1 mA max for a 10% change Line Regulation voltage change voltage change voltage change in input voltage < 0.3 V for a 100 μA load < 0.1 V for a 10 μA load < 0.5 V for a 400 μA load 2 mA max from 0.4 to 1 Ω Load Regulation change change change load change at 3 A -30 kV, 200 μA, -35 kV for -1 kV, 100 μA (accelerator +10 kV, 400 μA (accelerator 3 A at 5 V max (accelerator Output conditioning only (ground referenced) referenced) referenced) referenced) ±20 V ±5 V ±15 V -- Accuracy LF: 50 mV peak to peak max LF: 30 mV peak to peak max LF: 20 mV peak to peak max LF: 1 mA peak to peak max Voltage Ripple under specified conditions under specified conditions under all conditions under all conditions* HF: 25 mV peak to peak HF: 20 mV peak to peak HF: 15 mV peak to peak max HF: 5 mV peak to peak max max under specified max under specified under all conditions under all conditions* conditions conditions 0 to -35 kV, accuracy ±0.5% 0 to -1 kV, accuracy ±0.5% 0 to +10 kV, accuracy ±0.5% 0 to +6 V, 16 bit resolution, Voltage Monitor accuracy ±1% 0 to 250 μA 0 to 150 μA 0 to 500 μA 0 to 3 A Current Monitor 16-bit resolution 16-bit resolution 16-bit resolution 16-bit resolution ±0.5% accuracy ±0.5% accuracy ±0.5% accuracy ±2 mA accuracy for 2 to 3A ±20 mA accuracy for all other values < 0.3 V over a 15 min period < 0.2 V over a 15 min period < 0.3 V over a 15 min period 0.5 mA over a 1 hour period Stability (after warmup period) (after warmup period) (after warmup period) (after warmup period) 25 ppm max per °C over 25 ppm max per °C over 25 ppm max per °C over 100 ppm max per °C over Thermal Drift operating temperature operating temperature operating temperature operating temperature Environmental 10 to 45°C (50 to 113°F) Operational Temperature -20 to +70°C (-4 to 158°F) Storage/Transport temperature Sea level to 2000 m (6562') Altitude 80% max relative humidity up to 31°C, reducing linearly to 50% at 40°C (140°F), non-condensing (ref. EN61010-1) Humidity Free convection Cooling Physical Module 19" Rack See mechanical drawings, on page 5. Dimensions (W x H x D) 10.2 kg (22.5 lb) 12 kg (26.5 lb) Weight (Approx.) Steel and aluminum with protective treatment Construction RS-232; supplied by fully isolated fiber optics Remote Interface Hewlett Packard® versatile optical link: HP T-1521/HP R-2521 Remote Interface Connector 2-way PTR/Phoenix STLZ950/2-G-5.08-H-green (pin 1 positive, pin 2 negative) Input Connector 9-way, female, D-type RS-232 Fiber Connector Hewlett Packard® versatile optical link: HP T-1521/HP R-2521 (rear-panel mounted) Interlock Connector Heater: 2 wires of custom 4-way HV connector HV Output Connectors Suppressor: 1 wire of custom 4-way HV connector Extractor: 1 wire of custom 4-way HV connector *Ripple measured with a 1 Ω load and 3 A DIMENSIONAL DRAWINGS PROVEN DESIGN TECHNIQUES AND POWER-CONVERSION TECHNOLOGIES FOR HIGH STABILITY, REPEATABILITY, AND RELIABILITY Rack Unit Module For international contact information, visit advanced-energy.com. ENG-HV-EG353-230-02 2.16 Specifications are subject to change without notice. ©2016 Advanced Energy Industries, Inc. All rights reserved. Advanced Energy®, AE®, Hitek Power®, and Hitek Power® Ltd. are U.S. trademarks of Advanced Energy Industries, Inc. Hewlett Packard® is a trademark of Hewlett-Packard Development Company, L.P.