Wafer-carrier Mounting Photomicrosensors EE-SPY801/802 CSM_EE-SPY801_802_DS_E_3_2 Photomicrosensors for detecting wafer-carrier mounting. • The mounting position is set with a pedestal. The contact surface with the wafer carrier uses a special chemical- resistant fluororesin. The unique optical system enables stable detection of almost all wafer-carriers. Light modulation effectively reduces external light interference. Utilizes talc-free clean cables. For the most recent information on models that have been certified for Be sure to read Safety Precautions on safety standards, refer to your OMRON website. page 3. Ordering Information Sensors Infrared light Sensing Sensing Appearance Output configuration Cable length Model method distance EE-SPY801 2M Turns ON when wafer carrier is Reflective type 2 m 0 to 3 mm present. EE-SPY802 2M Accessories (Order Separately) Item Model EE9-C01 Pedestal EE9-C02 Note: There are no sensor functions provided. 1 EE-SPY801/802 Ratings and Specifications Item Models EE- SPY801/802 2 Sensing distance 0 to 5 mm (White paper: 15 × 15 mm , reflection factor: 90%) 2 (Standard sensing object) 0 to 3 mm (Black paper: 15 × 15 mm , reflection factor: 10%) Sensing object Transparent or opaque wafer carriers Operation indicator Lit orange when object is detected. Light source GaAs infrared LED with a peak wavelength of 940 nm Supply voltage 12 to 24 VDC ±10%, ripple (p-p): 5% max. Current consumption 30 mA max. NPN open collector: Load power supply voltage: 5 to 24 VDC Load current: 100 mA max. Control output OFF current: 0.5 mA max. 100 mA load current with a residual voltage of 0.8 V max. 40 mA load current with a residual voltage of 0.4 V max. Response time 5 ms max. Ambient illumination 3,000 lx max. with incandescent light or sunlight on the surface of the receiver Operating: −10 to +55°C Ambient temperature range Storage: −25 to +65°C (with no icing) Operating: 5% to 85% Ambient humidity range Storage: 5% to 95% (with no condensation) 2 Destruction: 1 to 500 Hz, 1.0-mm single amplitude or 150 m/s each in X, Y, and Z directions Vibration resistance 3 times and for 11 min. each 2 Shock resistance Destruction: 500 m/s for 3 times each in X, Y, and Z directions Degree of protection IEC IP30 Connecting method Pre-wired (Standard length: 2 m) Weight (packaged) Sensor: Approx. 43 g; Accessory (Pedestal): Approx. 9 g Case Ethylene tetrafluoro ethylene (ETFE) Material Base plate Polybutylene phthalate (PBT) Accessories Instruction Manual I/O Circuit Diagrams Model Output configuration Timing charts Output circuit With wafer carrier Operation indicator (orange) + (Brown) Without wafer carrier ON Operation indicator OUT Load Turns ON when EE-SPY801 (orange) (Black) OFF Main wafer carrier is 12 to 24 VDC EE-SPY802 circuit ON Output present. transistor OFF − (Blue) Operates Load (etc., relay) Releases 2 EE-SPY801/802 Standard Usage This sensor is designed to detect wafer-carrier mountings. The Install a Sensor (or Pedestal) at each of the four corners indicated by bottom of the wafer carrier has a ribbed construction for the leg a circle in the following diagram. section, as shown in the following diagram. The EE-SPY801/802 detects the wafer-carrier mounting using a reflective optical sensor AD that detects the leg section of the wafer-carrier. Wafer carrier side view (details omitted) (Top view) Wafer carrier side view (details omitted) (Side view) Sensor Sensor BC Wafer carrier leg section A and C EE-SPY801 or EE9-C01 B and D EE-SPY802 or EE9-C02 Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. ● Wiring When extending the cable, use an extension cable with conductors 2 having a total cross-section area of 0.15 mm (AWG26 equivalent). The total cable length must be 5 m maximum. To use a cable length longer than 5 m, attach a capacitor with a capacitance of approximately 10 μF to the wires as shown below. The distance between the terminal and the capacitor must be within 5 m. ● Mounting Mount the Photomicrosensors securely on a flat surface, and tighten the mounting screws using a tightening force of 0.30 N·m max. (Using a spring washer is recommended to prevent the screws from becoming loose.) ● Adjustment The EE-SPY801/802 requires 10 ms to be in stable operation after power is supplied. If separate power supplies are used for the EE-SPY801/802 and load, be sure to supply power to the EE-SPY801/802 before supplying power to the load. ● Operating Environment Do not use the EE-SPY801/802 in locations subject to salty air or corrosive gases, such as hydrogen chloride gas. 3 EE-SPY801/802 (Unit: mm) Dimensions Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Sensors EE-SPY801 EE-SPY802 Indicator window (orange) Indicator window (orange) 22 +1.3 32 −0.3 22 +1.3 32 −0.3 11 +1.3 30 0 11 8 +1.3 35° 35° 30 0 8 35° 35° 2 3.5 15 2 6 3.5 15 6 Sensing window 7.4 Sensing window 8 7.4 5 Vinyl-insulated round cable of 8 5 3.5 dia., 3 cores, 2 (0.15 mm with 1.0-dia. insulator); Vinyl-insulated round cable Standard length: 2 m of 3.5 dia., 3 cores, 15 2 2 (0.15 mm with 1.0-dia. insulator); 15 2 Standard length: 2 m Two, M4 (depth: 6) Two, M4 (depth: 6) Accessories (Order Separately) Pedestal Pedestal EE9-C01 EE9-C02 22 22 +1.3 +1.3 32 32 −0.3 −0.3 11 11 +1.3 +1.3 30 30 0 0 35° 35° 35° 35° 15 15 6 6 5 5 15 15 2 2 Two, M4 (depth: 6) Two, M4 (depth: 6) 4 Read and Understand This Catalog Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you have any questions or comments. Warranty and Limitations of Liability WARRANTY OMRON's exclusive warranty is that the products are free from defects in materials and workmanship for a period of one year (or other period if specified) from date of sale by OMRON. OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NON-INFRINGEMENT, MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED. LIMITATIONS OF LIABILITY OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY. In no event shall the responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted. IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE PRODUCTS UNLESS OMRON'S ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED, INSTALLED, AND MAINTAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE MODIFICATION OR REPAIR. Application Considerations SUITABILITY FOR USE OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of products in the customer's application or use of the products. At the customer's request, OMRON will provide applicable third party certification documents identifying ratings and limitations of use that apply to the products. This information by itself is not sufficient for a complete determination of the suitability of the products in combination with the end product, machine, system, or other application or use. The following are some examples of applications for which particular attention must be given. This is not intended to be an exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the products:  Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in this catalog.  Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement machines, vehicles, safety equipment, and installations subject to separate industry or government regulations.  Systems, machines, and equipment that could present a risk to life or property. Please know and observe all prohibitions of use applicable to the products. NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCTS ARE PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM. PROGRAMMABLE PRODUCTS OMRON shall not be responsible for the user's programming of a programmable product, or any consequence thereof. Disclaimers CHANGE IN SPECIFICATIONS Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice to change model numbers when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the products may be changed without any notice. When in doubt, special model numbers may be assigned to fix or establish key specifications for your application on your request. Please consult with your OMRON representative at any time to confirm actual specifications of purchased products. DIMENSIONS AND WEIGHTS Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown. PERFORMANCE DATA Performance data given in this catalog is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of OMRON’s test conditions, and the users must correlate it to actual application requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability. ERRORS AND OMISSIONS The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical, or proofreading errors, or omissions. 2012.8 In the interest of product improvement, specifications are subject to change without notice. OMRON Corporation Industrial Automation Company http://www.ia.omron.com/ (c)Copyright OMRON Corporation 2012 All Right Reserved.