D6F-P MEMS Flow Sensor A Compact, High-accuracy Flow Sensor with Superior Resistance to Environments. • Anti-dust performance is improved using the Cyclon method. A full lineup of models with di fferent connector types: bamboo joints, lead terminals for direct mounting on-board, and mani- folds. High accuracy of ±5% FS. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information MEMS Flow Sensor Flow Port Type Connection Applicable fluid Flow rate range Model 0 to 0.1 L/min D6F-P0001A1 Lead terminals Bamboo joint D6F-P0010A1 Air 0 to 1 L/min D6F-P0010A2 Connector Manifold D6F-P0010AM2 Accessory (Sold separately) Type Model Cable D6F-CABLE2 Output Voltage Characteristics D6F-P0001A1 D6F-P0010A1/-P0010A2/-P0010AM2 3.0 3.0 2.5 2.5 2.0 2.0 1.5 1.5 1.0 1.0 0.5 0.5 0.0 0.0 0 0.02 0.04 0.06 0.08 0.10 0 0.25 0.5 0.75 1 Flow rate (L/min) Flow rate (L/min) Flow rate Flow rate 0 0.02 0.04 0.06 0.08 0.10 0 0.25 0.50 0.75 1.00 L/min (normal) L/min (normal) Output voltage 0.50 0.90 1.30 1.70 2.10 2.50 Output voltage 0.50 1.60 2.10 2.31 2.50 V ±0.10 ±0.10 ±0.10 ±0.10 ±0.10 ±0.10 V ±0.10 ±0.10 ±0.10 ±0.10 ±0.10 Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient tem- Measurement conditions: Power supply voltage of 5.0±0.1 VDC, ambient tem- perature of 25±5°C, and ambient humidity of 35% to 75%. perature of 25±5°C, and ambient humidity of 35% to 75%. 25 Output voltage (V) Output voltage (V) D6F-P MEMS Flow Sensor Characteristics/Performance Model D6F-P0001A1 D6F-P0010A1 D6F-P0010A2 D6F-P0010AM2 Flow Range (See note 1.) 0 to 0.1 L/min 0 to 1 L/min Calibration Gas (See note 2.) Air Bamboo joint Flow Port Type Manifold Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm Electrical Connection Lead terminals Three-pin connector Power Supply 4.75 to 5.25 VDC Current Consumption 15 mA max. with no load and a Vcc of 5.0 V Output Voltage 0.5 to 2.5 VDC (Load resistance: 10 kΩ) Accuracy ±5% FS (25°C characteristic) Repeatability (See note 3.) ±1.0% FS ±0.4% FS Output Voltage (Max.) 3.1 VDC (Load resistance: 10 kΩ) Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 10 VDC Rated Output Voltage 4 VDC Case PBT Degree of Protection IEC IP40 (Excluding tubing sections.) Withstand Pressure (See note 3.) 50 kPa Pressure Drop (See note 3.) 0.005 kPa 0.19 kPa 0.67 kPa Operating Temperature (See note 4.) −10 to +60°C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) −40 to +80°C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics ±5% FS for 25°C characteristic at an ambient temperature of -10 to +60°C Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 8.5 g 8.0 g Note: 1. Volumetric flow rate at 0°C, 101.3 kPa. Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Note: 3. Reference (typical) Note: 4. With no condensation or icing. Tubing You can measure large flows by mounting the Sensor on a bypass. D6F-P Flow Sensor P1 P2 Resistance to flow Mounting Direction PCB-mounting Sensor Manifold-type Sensor 26 D6F D6F MADE IN JAPAN MADE IN JAPAN D6F-P MEMS Flow Sensor Connections/Dimensions (Unit: mm) ● Lead Terminals Label: Gives model and lot numbers. D6F-P0001A1/D6F-P0010A1 Two, 3-dia. through hole 13.5 Two, 4.9 dia. 10 7.3 4.76 Three, 1.3-dia. lands 23.3 11.7 7.2 Two, 1.1 dia. 2.6 dia. Label 2.54 Three, 0.8-dia. through holes 5.04 14 7.6±0.2 Recommended Dimensions for 27.2 Connector Mounting Holes (Bottom view) 16.2 6 1.2 1.7 Connector 9.8 A 6 XG8V-0344 17.2 13.5 (manufactured Two, R: 1.4 2.8 dia. by OMRON) 1.5 3. GND 7.2 2.54 13.2 1. Vcc 5.08 2. Vout 4.76 Detailed View of A ● Connectors D6F-P0010A2 Label: Gives model and lot numbers. Two, 4.9 dia. 10 7.3 23.3 11.7 Two, 1.1 dia. 2.6 dia. 1.Vcc 14 7.6±0.2 Label 27.2 A 2.Vout 16.2 8.5 6 3.GND 1.2 1.7 Detailed View of A 13.5 8.5 2.8 dia. Two, R: 1.4 17.2 1.5 13.2 D6F-P0010AM2 Pin No. 1: Vcc 2: Vout 22 ±0.1 1 dia., 18 8 3: GND ±0.1 6.7±0.1 *1 Depth: 2.4 2 0 Connector SM03B-SRSS-TB (made by J.S.T. Mfg. Co.) Two, 4 dia. −0.05 B Note: Use one of the following connectors from JST Mfg. 3.5 dia. Co., Ltd. to connect to the D6F. +0.1 1 0 27.2 ±0.05 14 A 1) Pressure welding connector 6.4 9.6 22.1 Socket: 03SR-3S Wire: AWG#30 2-R6 Or Two, C0.3 6 2) Crimp type connector (entire circumference) 3.GND Contact: SSH-003T-P0.2 ±0.1 2.Vout 2.7 Housing: SHR-03V-S 1.Vcc 0.3±0.1 Wire: AWG#32 to #28 ±0.1 0.3 Tubes Install tubes made of materials such as rubber or urethane Lot number label Detailed View of A Detailed View of B so that they will not come out. Grooves to stop rotation Connector Details For urethane tubes, tubes with an outer diameter of 6 mm *1. Recommended Installation Dimensions and an inner diameter of 4 mm are recommended. O-ring Installation Hole Dimensions Depth: 2.6 to 3.0 Soldering Conditions Use a soldering iron for 5 s at 350°C with a pressure of 100 6.7±0.1 +0.5 C0.4 (entire circumference) Two, 7 dia. The recommended gf max. 0 +0.5 7 0 O-ring is JIS B 2401, (This applies only to PCB-mounting Sensors.) M3 threaded nominal number P4. ±0.05 14 ● Cable (Optional) White wire 3: GND Black wire D6F-CABLE2 2: Vout Red wire 1: Vcc ±3 ±10 15 180 (5) 27