D6F-W MEMS Flow Sensor A Compact Sensor That Uses OMRON’s Unique Flow Path Structure for High-performance Flow Rate Measurement. Anti-dust performance enhanced by OMRON’s unique three-dimensional flow path structure. High accuracy of ±5% FS. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-W01A1 D6F-W04A1 6.0 6.0 Applicable fluid Flow rate range Model 5.0 5.0 0 to 1 m/s D6F-W01A1 4.0 4.0 Air 0 to 4 m/s D6F-W04A1 3.0 3.0 0 to 10 m/s D6F-W10A1 2.0 2.0 1.0 1.0 0.0 0.0 0.00 0.25 0.50 0.75 1.00 0.0 1.0 2.0 3.0 4.0 Accessory (Sold separately) Flow velocity (m/s) Flow velocity (m/s) Type Model D6F-W10A1 Cable D6F-W CABLE 6.0 5.0 4.0 Connections 3.0 2.0 D6F-W01A1 1.0 D6F-W04A1 0.0 02 4 6 8 10 D6F-W10A1 Flow velocity (m/s) 2. Vout. D6F-W01A1 3. GND. Flow velocity 1. Vcc. 0 0.25 0.50 0.75 1.00 m/s Output voltage V 1.00±0.2 1.35±0.2 2.01±0.2 3.27±0.2 5.00±0.2 Pin No. 1: Vcc D6F-W04A1 2: Vout Enlarged View Flow velocity 3: GND 0 1.0 2.0 3.0 4.0 m/s Connector S3B-ZR-SM2-TF Output voltage V 1.00±0.2 1.58±0.2 2.88±0.2 4.11±0.2 5.00±0.2 (made by J.S.T. Mfg. Co.) The flow velocity is the value calculated from the mass flow rate in OMRON’s specified Use the following connectors from 48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Mea- J.S.T. Mfg. Co. Ltd. to connect the D6F: surement Law of Japan. The wind tunnel conditions are shown in Figure 1, below. Housing: ZHR-3 Flow velocity measurement Figure 1: Wind Tunnel position Air volume sensor Contacts: SZH-002T-P0.5 48 dia. Wires: AWG28 to AWG26 20.8 60 Or Measurement conditions: Power supply voltage of 12 VDC, ambient tempera- Contacts: SZH-003T-P0.5 ture of 25°C, and ambient humidity of 35% to 75%. Wires: AWG32 to AWG28 D6F-W10A1 Flow velocity 0 2.0 4.0 6.0 8.0 10.0 m/s Output voltage V 1.00±0.24 1.94±0.24 3.23±0.24 4.25±0.24 4.73±0.24 5.00±0.24 The flow velocity is the value calculated from the mass flow rate in OMRON’s specified 155-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Mea- surement Law of Japan. The wind tunnel conditions are shown in Figure 2, below. Air volume sensor Honeycomb flow grate Figure 2: Wind Tunnel 155 dia. 18 Flow velocity measurement position 10 100 Measurement conditions: Power supply voltage of 12 VDC and ambient temper- ature of 25°C 31 Output voltage (V) Output voltage (V) Output voltage (V) D6F-W MEMS Flow Sensor Characteristics/Performance Model D6F-W01A1 D6F-W04A1 D6F-W10A1 Flow Range (See note 1.) 0 to 1 m/s 0 to 4 m/s 0 to 10 m/s Calibration Gas (See note 2.) Air Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ) Accuracy ±5% FS (25°C characteristic) ±6% FS (25°C characteristic) Repeatability (See note 3.) ±0.4% FS Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ) Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ) Rated Power Supply Voltage 26.4 VDC Rated Output Voltage 6 VDC Case PPS Degree of Protection IEC IP40 (except for flow inlet and outlet) Operating Temperature (See note 4.) −10 to 60°C Operating Humidity (See note 4.) 35% to 85% Storage Temperature (See note 4.) −40 to 80°C Storage Humidity (See note 4.) 35% to 85% Temperature Characteristics ±5% FS for 25°C characteristic at an ambient temperature of −10 to 60°C Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC) Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.) Weight 6.3 g Note: 1. Volumetric flow rate at 25°C, 101.3 kPa. Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.) Note: 3. Reference (typical) Note: 4. With no condensation or icing. Dimensions (Unit: mm) ● MEMS Flow Sensors 9 D6F-W01A1 Mounting Hole Dimensions D6F-W04A1 ±0.2 3.2 20 D6F-W10A1 2.6 1.2 1.2 2.6 8 Two, M3 screws R4 Two, R: 1.6 8 4.2±0.2 Flow inlet Flow outlet MADE IN JAPAN 30.5±0.05 39 24 5 5 30.5±0.2 19.5 Flow outlet 2 dia., Depth: 2.5 7 R4 3.2 ±0.2 dia. 4 Lot number label ● Cable (Optional) D6F-W CABLE 5±1 GND: Blue Vout: Black Vcc: Brown 15±3 30±10 50±10 100±10 32